Citation: FU Liang, SHI Shu-Yun, CHEN Xiao-Qing. Ultra-trace Metal Elements Analysis of High Purity Tetramethylammonium Hydroxide Using Inductively Coupled Plasma Tandem Mass Spectrometry. Chinese Journal of Analytical Chemistry, 2018, 46(1): 107-112. doi: 10.11895/j.issn.0253-3820.171061 [复制]
Ultra-trace Metal Elements Analysis of High Purity Tetramethylammonium Hydroxide Using Inductively Coupled Plasma Tandem Mass Spectrometry
An analytical method was proposed to determine the ultra-trace metal elements in high-purity tetramethylammonium hydroxide (TMAH). A total of 12 kinds of ultra-trace metal elements in 25% (w/w) high-purity TMAH aqueous solution were directly determined after simple dilution with ultrapure water by inductively coupled plasma tandem mass spectrometry (ICP-MS/MS). In MS/MS mode, the spectral interferences were eliminated by the reaction of target ions with O2 or NH3/He (1:9, V/V) in the collision/reaction cell (CRC) of the ICP-MS/MS. Cr, Mn, Ni and Mo were determined using the O2 mass shift method. Cd and Pb were analyzed based on the O2 on-mass method. Fe, Co, Cu and Zn were determined using the NH3/He mass shift method. Mg and Al were determined using the NH3/He on-mass. The detection limits for analytes were in the range of 0.3-57.2 ng/L. The spiked recoveries were in range of 92.0%-106.0%, and the relative standard deviations (RSDs) were less than or equal to 4.6%. The procedure was applied for determining ultra-trace metal elements in 25% high-purity TMAH aqueous solution.
SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide. Semiconductor Equipment and Materials International